Inline Sputtering System

  • Inline Magnetron Sputtering system

    Inline Magnetron Sputtering system

    Inline Magnetron Sputtering system is a kind of vacuum thin film deposition equipment that works for different purposes. The most common applications of our sputtering line including:

    Aluminum mirror manufacturing

    1. ITO glass coating
    2. Anti Reflective glass
    3. Decorative coatings for stainless steel and glass

     

    This coating system is suitable for high class vacuum coating applications. It produces stable work performance to improve the quality of vacuum coating films.

  • ITO Glass Magnetron Sputtering Coating Line

    ITO Glass Magnetron Sputtering Coating Line

    ITO Glass Magnetron Sputtering Coating Line adopts vacuum magnetron sputtering technology and unbalanced magnetron sputtering technology to coat high quality float glass with SO2/ITO layer. Based on international advanced control system. The whole manufacturing process works automatically and continuously.

  • Aluminum Mirror Inline Magnetron Sputtering Line

    Aluminum Mirror Inline Magnetron Sputtering Line

    Aluminum Mirror Inline Magnetron Sputtering Line is designed for high output of glass mirror manufacturing purpose. In order to coat bigger glass and take care about fragile glass panel, especially for the large size sheets, we usually make horizontal type of sputtering line. It is a continuous magnetron coating line, with the front and rear rough pumping chamber, and after the transition chamber, before and after the fine pumping chamber, a buffer chamber, color plating room.

    Target design:  cylindrical magnetron sputtering cathodes or/and planar cathodes.

    Power source: power supply with high power DC or MF magnetron sputtering

    Drive system: roller drive, frequency adjustable, induction type room door opening system.

    Vacuum system: diffusion pump (or turbo molecular pump) + roots pump + mechanical pump