-One/Two Doors
Frame and chamber are made of carbon stainless steel.
Each door provides an inspection window for the visual control of the process. The door walls provide a stainless steel liner which is easily removal for maintenance.
-Customized Vacuum Chamber
The chamber provides inner stainless steel liners easily removal for cleaning.
The pumps stand on its rear part.
The chamber has a series of small flange for the purpose of measuring.
-High vacuum pumping system
Diffusion pump+Booster pump+Mechanical pump
-Vacuum measuring and control
With metal Pirani gauge+metal Ionization gauge
-Fixtures moving system
-PLC Control unit
-Aluminum evaporation system with high power transformer
-Iron frame
The structure is reasonable
The film layer is uniform
Film forming quality
High pumping speed, short working cycle and high production efficiency
Operation is convenient
Low energy consumption and stable performance
Model Number |
EV-1000 |
EV-1200 |
EV-1400 |
EV-1800 |
EV-2000 |
Two doors or Two chambers model are available |
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Dimension of vacuum chamber(diameter*height) |
1000*1100 |
1200*1400 |
1400*1600 |
1800*2000 |
2000*2200 |
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Material of vacuum chamber |
Carbon steel, SUS304 or SUS316L |
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Technology of working |
vacuum resistance evaporation with tungsten& aluminum filaments, high power evaporation transformer |
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Pumping system |
Diffusion pump+mechanical pumps, booster pump |
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Pumping Time |
From atmosphere to 5.0*10-2Pa less than 8 minutes |
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Vacuum Limit |
5.0*10-4 Pa |
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Working temperature |
Room temperature |
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Working mode |
Automatic or Manual mode, by 10.4 inches PLC touches screen |
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Total Power |
40-80kW |
70-140kW |
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Footprint |
2*2 meters |
2*3 meters |
3*3 meters |
3*3 meters |
3*4 meters |
4*5 meters |
5*6 meters |
These units you can custom made |
1. Size of vacuum chamber 2. Configurations of pumps |
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Optional instruments |
1. Leakage detector 3. Arc ion deposition system 4. Magntron sputtering system |