Aluminum Mirror Inline Magnetron Sputtering Line

Short Description:

Aluminum Mirror Inline Magnetron Sputtering Line is designed for high output of glass mirror manufacturing purpose. In order to coat bigger glass and take care about fragile glass panel, especially for the large size sheets, we usually make horizontal type of sputtering line. It is a continuous magnetron coating line, with the front and rear rough pumping chamber, and after the transition chamber, before and after the fine pumping chamber, a buffer chamber, color plating room.

Target design:  cylindrical magnetron sputtering cathodes or/and planar cathodes.

Power source: power supply with high power DC or MF magnetron sputtering

Drive system: roller drive, frequency adjustable, induction type room door opening system.

Vacuum system: diffusion pump (or turbo molecular pump) + roots pump + mechanical pump